000 00467nam a2200181Ia 4500
005 20220916111821.0
008 210915s9999||||xx |||||||||||||| ||und||
020 _a9781107645790
_c3719.47
040 _aMAIN
041 _aEnglish
082 _a621.381 KUB
100 _aKubby, Joel A.
_96004
245 0 _aGuide To Hands On MEMS Design And Prototyping
260 _bCambridge
_aNew York
_c2011
300 _a166
650 _a(RUSA) Design
_916906
942 _cBK
999 _c40831
_d40831